Precision-engineered for contamination-sensitive environments, this particle-controlled one inch lighter gas valve ensures integrity in critical gas distribution systems. Featuring 316L-VAR stainless steel with <0.5 Ra µm electropolished finish, this high-purity gas valve achieves Class 1/ISO 2 particulate standards for semiconductor process gases. The self-aligning conical seal design eliminates metal-to-metal contact, preventing particle generation during 100,000+ actuations. As an essential laboratory gas valve, it incorporates VCR-style face seals for helium-leak-tight integrity to 1x10⁻⁹ atm-cc/sec He, maintaining ppb-level purity for specialty gases like arsine and silane. The non-shedding PTFE stem seals and zero-dead-leg configuration meet SEMI F72 standards. Includes integral particulate monitoring ports for in-situ ISO 14644-1 Class 3 compliance verification during installation.
Bullet Points:
✓ Nanoscale Cleanliness: <5 particles >0.1μm per liter (per IEST RP CC001.6)
✓ Bubble-Tight Sealing: 1x10⁻⁹ atm-cc/sec helium leak rate
✓ Corrosion Immunity: Passivates per ASTM A967 nitric acid method
✓ Vibration-Free Operation: Anti-resonance stem design
✓ Fab-Proven: SEMI F72-compliant laboratory gas valve
Application Scenario:
In a semiconductor cleanroom, technicians install valves using particle counters to verify zero contamination during 5nm chip fabrication gas line commissioning.
FAQ:
Q: What particulate certification comes with this high-purity gas valve?
A: IEST-CC0016 Class 1 reports with 0.1-5.0μm particle distribution data.
Q: Are your laboratory gas valves compatible with toxic dopants?
A: Yes, designed for SEMI S2 Category 1 gases with full material compatibility.
Q: Can I integrate particulate monitoring without process interruption?
A: Yes, sample ports allow ISO 14644-1 compliant in-situ verification.
Q: What’s the outgassing performance?
A: <1x10⁻⁹ g/cm²/sec TML/CVCM per NASA-STD-6001B.
Q: Do you provide installation contamination control protocols?
A: Detailed ISO 14644-5-compliant installation kits available.
